Extreme High Resolution Scanning Electron Microscope (XHR-SEM)

The microscope is a Magellan 400 from the FEI company. It is equipped with 5 detectors: 

   - ETD: Everhart-Thornley detector
   - TLD: through-lens detector (in-lens)
   - vCD: low voltage high contrast detector
   - STEM: detector for scanning transmission electron microscopy
   - EDS: detector for energy dispersive spectroscopy. The instrument is equipped with X-Max 80 Silicon Drift Detector.

 Main features:

   - Schottky emitter
   - Sub-nanometer resolution from 1 to 30kV
   - Beam decceleration
   - Monochromator
   - Beam current down to 0.8 pA

Thanks to these properties the Magellan is the instrument of choice for high resolution on non-conductive samples.

Ansvarig person

Relaterade artiklar

Johanne Mouzon

[http://www.ltu.se/staff/j/johmou-1.11429]

Iftekhar Uddin Bhuiyan

[http://www.ltu.se/staff/i/iftbhu-1.38473]

Sidansvarig och kontakt: Richard Renberg

Publicerad: 22 april 2006

Uppdaterad: 5 september 2013

Luleå tekniska universitet