Extreme High Resolution Scanning Electron Microscope (XHR-SEM)

The microscope is a Magellan 400 from the FEI company. It is equipped with 5 detectors: 

   - ETD: Everhart-Thornley detector
   - TLD: through-lens detector (in-lens)
   - vCD: low voltage high contrast detector
   - STEM: detector for scanning transmission electron microscopy
   - EDS: detector for energy dispersive spectroscopy. The instrument is equipped with X-Max 80 Silicon Drift Detector.

 Main features:

   - Schottky emitter
   - Sub-nanometer resolution from 1 to 30kV
   - Beam decceleration
   - Monochromator
   - Beam current down to 0.8 pA

Thanks to these properties the Magellan is the instrument of choice for high resolution on non-conductive samples.

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Published: 22 April 2006

Updated: 5 September 2013


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