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Extreme High Resolution Scanning Electron Microscope (XHR-SEM)
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Extreme High Resolution Scanning Electron Microscope (XHR-SEM)

Published: 27 November 2018

The microscope is a Magellan 400 from the FEI company. It is equipped with 6 detectors:

  • ETD: Everhart-Thornley detector
  • TLD: through-lens detector (in-lens)
  • vCD: low voltage high contrast detector
  • STEM: detector for scanning transmission electron microscopy
  • EDS: detector for energy dispersive spectroscopy. The instrument is equipped with an X-Max 80 Silicon Drift Detector (Oxford Instruments)
  • EBSD: detector for electron backscatter diffaction. The instrument is equipped with an HKLNordlysNano EBSD detector (Oxford Instruments).

Main features:

  • Schottky emitter
  • Sub-nanometer resolution from 1 to 30kV
  • Beam decceleration
  • Monochromator
  • Beam current down to 0.8 pA

Thanks to these properties the Magellan is the instrument of choice for high resolution on non-conductive samples.


The microscope is equipped with a Vacuum Cryo-Transfer System and a cryo-stage (VCT100, Leica) for observations with extreme high resolution at temperatures down to -140°C. For instance, this makes it possible to observe frozen samples.

Liang Yu

Liang Yu, Associate Professor

Phone: +46 (0)920 493002
Organisation: Chemical Technology, Chemical Engineering, Department of Civil, Environmental and Natural Resources Engineering